Georg Schitter has greatly influenced a variety of scanning measurement systems, making a
substantial impact on academia, industry, and society as a whole. His work on high-speed atomic
force microscopy (AFM) led to the first video-rate AFM with a scanning range of more than 10
micrometers, which is suitable for various real-time applications in material science, biology, and
the semiconductor industry. In his work on fast scanning, he developed a novel control scheme
for the microscope’s galvanometer scanner, achieving a 10-fold improvement in the imaging
speed while significantly reducing the scanning-induced image artifacts. He also developed
MEMS-mirror-based scanning systems for automotive applications, achieving the highest scan
accuracy and robustness against vibration within the vehicle.
An IEEE Senior Member, Schitter is Professor, School of Electrical Engineering and
Information Technology, and Chair for Mechatronic Systems, Mechatronics and Power
Electronics Institute (MPEI), TU Wien, Vienna, Austria.
